Field Emission Gun Scanning Electron Microscope & EBSD & EDS (FESEM-EBSD-EDS)

Faculty-in-Charge: Prof. Madhumanti Bhattacharyya

Phone:

Make: JEOL & OXFORD

Model: JSM-IT800(HL)

JSM-IT800 (HL) is a highly stable Schottky field emission electron gun Scanning Electron Microscope, with EDS & EBSD. To analyze samples surface morphology up to nano level, elemental composition, grain size, orientation and microstructure etc.

FESEM – Key Features

FESEM
Gun Type In-lens Schottky field emission electron gun
Resolution 0.7 nm at 20 kV
1.3 nm at 1 kV
3.0 nm at 15 kV
Magnification 17 to 2,000,000
Acceleration Voltage 0.5 kV to 30 kV
Probe Current 4 pA to 300 nA
Detectors In-lens SE, BSE
EDS
EDS System Oxford Liquid Nitrogen free (Peltier-Cooled) dry SDD Xplore 30
SSD Sensor Area 30 mm² SSD Sensor
Energy Resolution < 129 eV at Mn-Kα
Count Rates > 1,000,000 cps
EBSD
EBSD Detector Oxford CMOS based (C-Swift) EBSD Detector
Detector Resolution Up to 622 × 512
Acquisition Speed Speeds up to 2000 PPS
Sample Preparation
Sample Coating Gold & Platinum coating
Instrument Status : Running