X-Ray Photoemission Spectroscopy (XPS)

PHI III Scanning XPS Microprobe

The VersaProbe III is a highly versatile, multi-technique instrument with PHI’s patented, monochromatic, micro-focused (< 10 µm), scanning X-ray source. The instrument offers SEM-like ease of operation with superior micro area spectroscopy and excellent large area capabilities.

Optimized Configuration

A focused X-ray beam, high sensitivity spectrometer, high performance floating column argon ion gun, turnkey dual beam charge neutralization, compucentric Zalar™ rotation, and advanced data reduction algorithms provide the highest performance XPS depth profiling capability available. The standard monatomic argon ion gun is capable of generating 5 eV to 5 keV Ar ion beams and is ideally suited for most inorganic depth profiling applications.

The key features of XPS include:

• Scanned, micro-focused, monochromatic X-ray beam
• X-ray beam induced secondary electron imaging (SXI)
• Dual beam charge neutralization
• 128 data channel detection
• Chemical state imaging
• Single Crater multi-point depth profiling
• Floating column monatomic Ar ion gun
• Compucentric Zalar™ rotation
• Angle dependent XPS
• Five axis automated sample manipulator
• 25 mm and 60 mm diameter sample mount