Field Emission Scanning Electron Microscope (FESEM)

Make:	Zeiss, Germany
Model:	Supra 55
Faculty-in-Charge:	Prof. A. K. Bhaumik
Email:	fesem_crf@iitism.ac.in; ajoy@iitism.ac.in
Phone:	-

The Central Research Facility (CRF) has installed FE-SEM Supra 55 (Carl Zeiss, Germany) with Air Lock chamber for scientific research. Attachments available with the FE-SEM are STEM, EDS (Oxford Liquid Nitrogen free SDD X MAX 50 EDS), EBSD (Oxford Integrated Advanced Aztec HKL EBSD with forescatter detector system with 4 diodes for Nordlys Analysis) and Mono CL4 (Gatan, UK).

Key Features of FESEM include:

• FESEM: Resolution: 0.8 nm at 15 KV, 1.6 nm at 1 KV; Magnification: 12–1,000,000X; Acceleration voltage: 100 V to 30 KV; Gun type: Schottky Field Emission Electron Gun; Probe current: 12 pA to 100 nA; Detectors: SE, In-Lens, BSE, Retractable STEM with Bright and Dark field.
• EDS: Oxford Liquid Nitrogen free SDD X MAX 50 EDS; 50 mm² Silicon Drift Detector (SDD), count rates > 500,000 cps, Throughput > 200,000 cps, Resolution: 127 eV @ MnKα.
• EBSD: Oxford Integrated Advanced Aztec HKL EBSD with forescatter detector system with 4 diodes for Nordlys Analysis.
• CL: Gatan Mono CL4 (200–850 nm), UVMCL (185–200 nm) & FIRMCL (1600–2300 nm).
• Sample Coating: Facilities available for Carbon, Gold, and Platinum-Palladium coating.