Field Emission Scanning Electron Microscope


  • Make: Zeiss, Germany
  • Model: Supra 55
  • Faculty-in-Charge: Prof. A. K. Bhaumik
  • Email: fesem_crf@iitism.ac.in
  • Phone:

The Central Research Facility (CRF) has installed FE-SEM Supra 55 (Carl Zeiss, Germany) with Air Lock chamber for scientific research. Attachments available with the FE-SEM are STEM, EDS (Oxford Liquid Nitrogen free SDD X MAX 50 EDS), EBSD (Oxford Integrated Advanced Aztec HKL EBSD with forescatter detector system with 4 diodes for Nordlys Analysis) and Mono CL4 (Gatan, UK).


The key features of FESEM includes:


    FESEM:Resolution: 0.8 nm at 15 KV, 1.6nm at 1 KV; Magnification: 12-1000000X; Acceleration voltage: 100V TO 30 KV; Gun type: Schottky Field Emission Electron Gun; Maximum Probe

    Current: 12 pA to 100 nA; Detectors: SE, In-Lens, BSE, Retractable STEM with Bright and dark field

    EDS: Oxford Liquid Nitrogen free SDD X MAX 50 EDS; Single sensor large area (50 mm2) Silicon Drift Detector (SDD) sensor, count rates > 500,000 cps, Throughput > 200,000 cps,

    Resolution: @ 127eV @ MnKα

    EBSD:Oxford Integrated Advanced Aztec HKL EBSD with forescatter detector system with 4 diodes for Nordlys Analysis

    CL:Consisting Gatan Mono CL4 (wavelength ranges between 200-850nm), UVMCL (wavelength ranges between 185-200nm) & FIRMCL (wavelength ranges between 1600-2300nm)

    Sample Coating facilities:Carbon, Gold and Platinum-Palladium are available